Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689339 | Alignment apparatus | Kazuya Ota, Kouichirou Komatsu, Nobutaka Magome | 1997-11-18 |
| 5684595 | Alignment apparatus and exposure apparatus equipped therewith | Masaki Kato, Masashi Tanaka | 1997-11-04 |
| 5633721 | Surface position detection apparatus | — | 1997-05-27 |
| 5602399 | Surface position detecting apparatus and method | — | 1997-02-11 |