Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689339 | Alignment apparatus | Kouichirou Komatsu, Hideo Mizutani, Nobutaka Magome | 1997-11-18 |
| 5601957 | Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening | Shinji Mizutani, Masahiko Yasuda | 1997-02-11 |
| 5602644 | Alignment apparatus utilizing a plurality of wavelengths | — | 1997-02-11 |