Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5601957 | Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening | Kazuya Ota, Masahiko Yasuda | 1997-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5601957 | Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening | Kazuya Ota, Masahiko Yasuda | 1997-02-11 |