Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640243 | Position detection method | Hideki Koitabashi, Junji Hazama | 1997-06-17 |
| 5625436 | Scanning type exposure apparatus and exposure method | Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki, Tsuyoshi Narabe +1 more | 1997-04-29 |
| 5623343 | Exposure method and apparatus | Kei Nara, Seiji Miyazaki | 1997-04-22 |
| 5617181 | Exposure apparatus and exposure method | Hiroshi Shirasu, Tetsuo Kikuchi | 1997-04-01 |
| 5602620 | Scanning exposure apparatus and exposure method | Seiji Miyazaki, Kei Nara, Masami Seki | 1997-02-11 |