Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5625436 | Scanning type exposure apparatus and exposure method | Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki +1 more | 1997-04-29 |
| 5617211 | Exposure apparatus | Kei Nara, Toshio Matsuura, Muneyasu Yokota, Yukio Kakizaki, Yoshio Fukami +1 more | 1997-04-01 |