Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661837 | Illumination optical apparatus and scanning exposure apparatus using the same | Noriaki Yamamoto | 1997-08-26 |
| 5617181 | Exposure apparatus and exposure method | Masamitsu Yanagihara, Hiroshi Shirasu | 1997-04-01 |
| 5594587 | Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same | Hideki Komatsuda, Hideo Hirose | 1997-01-14 |