Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680429 | X-ray generating apparatus and X-ray microscope | Tamio Hara, Kozo Ando, Yoshinobu Aoyagi | 1997-10-21 |
| 5640284 | Optical reflector, illumination optical system, light source system and illumination optical apparatus | Osamu Tanitsu, Takashi Mori | 1997-06-17 |
| 5615047 | Illumination apparatus and exposure apparatus using it | Hideki Komatsuda, Takashi Mori | 1997-03-25 |
| 5594587 | Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same | Hideki Komatsuda, Tetsuo Kikuchi | 1997-01-14 |