Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5615047 | Illumination apparatus and exposure apparatus using it | Hideo Hirose, Takashi Mori | 1997-03-25 |
| 5594526 | Optical integrator and projection exposure apparatus using the same | Takashi Mori | 1997-01-14 |
| 5594587 | Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same | Hideo Hirose, Tetsuo Kikuchi | 1997-01-14 |