Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661837 | Illumination optical apparatus and scanning exposure apparatus using the same | Tetsuo Kikuchi | 1997-08-26 |
| 5636003 | Illumination optical apparatus and scanning exposure apparatus | Osamu Tanitsu, Takashi Mori | 1997-06-03 |