Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679974 | Antifuse element and semiconductor device having antifuse elements | Hiroshi Shinriki, Yoshimitsu Tamura | 1997-10-21 |
| 5652180 | Method of manufacturing semiconductor device with contact structure | Hiroshi Shinriki, Hiroshi Yamamoto, Nobuyuki Takeyasu, Takayuki Komiya | 1997-07-29 |
| 5641985 | Antifuse element and semiconductor device having antifuse elements | Yoshimitsu Tamura, Hiroshi Shinriki | 1997-06-24 |
| 5637534 | Method of manufacturing semiconductor device having multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Yumiko Kawano, Eiichi Kondoh, Tomoharu Katagiri | 1997-06-10 |
| 5627345 | Multilevel interconnect structure | Hiroshi Yamamoto, Nobuyuki Takeyasu | 1997-05-06 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1997-05-06 |
| 5605867 | Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same | Nobuyoshi Sato, Tadashi Nakano, Hiroshi Yamamoto | 1997-02-25 |