Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh +3 more | 1997-05-06 |
| 5605867 | Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same | Nobuyoshi Sato, Tomohiro Ohta, Hiroshi Yamamoto | 1997-02-25 |