Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1997-05-06 |