Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652180 | Method of manufacturing semiconductor device with contact structure | Hiroshi Shinriki, Hiroshi Yamamoto, Takayuki Komiya, Tomohiro Ohta | 1997-07-29 |
| 5637534 | Method of manufacturing semiconductor device having multilevel interconnection structure | Hiroshi Yamamoto, Yumiko Kawano, Eiichi Kondoh, Tomoharu Katagiri, Tomohiro Ohta | 1997-06-10 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1997-05-06 |
| 5627345 | Multilevel interconnect structure | Hiroshi Yamamoto, Tomohiro Ohta | 1997-05-06 |