Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637534 | Method of manufacturing semiconductor device having multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Eiichi Kondoh, Tomoharu Katagiri, Tomohiro Ohta | 1997-06-10 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh +3 more | 1997-05-06 |