Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605867 | Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same | Tomohiro Ohta, Tadashi Nakano, Hiroshi Yamamoto | 1997-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605867 | Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same | Tomohiro Ohta, Tadashi Nakano, Hiroshi Yamamoto | 1997-02-25 |