Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5673103 | Exposure apparatus and method | Soichi Inoue, Satoshi Tanaka | 1997-09-30 |
| 5627626 | Projectin exposure apparatus | Soichi Inoue, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Soichi Inoue, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-04-15 |