Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700605 | Mask for light exposure and process for production of the same | Takayuki Iwamatsu | 1997-12-23 |
| 5631109 | Exposure mask comprising transparent and translucent phase shift patterns | — | 1997-05-20 |
| 5627626 | Projectin exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-04-15 |