Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627626 | Projectin exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Shin Ito, Takashi Sato, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Soichi Inoue, Tadahito Fujisawa, Shin Ito, Takashi Sato, Keiji Horioka | 1997-04-15 |