Issued Patents 1997
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686209 | Phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Kenji Kawano, Hideya Miyazaki, Shinichi Ito, Soichi Inoue +2 more | 1997-11-11 |
| 5673103 | Exposure apparatus and method | Soichi Inoue, Tadahito Fujisawa | 1997-09-30 |
| 5664763 | Apparatus for blowing cable and method therefor | Hiroaki Sano, Kinji Taguchi | 1997-09-09 |
| 5655881 | Fluid turbine | Atsushi Itoh, Shigehisa Katsuma | 1997-08-12 |
| 5648400 | Process for producing polymeric electrolyte complex and ion-exchange resin | Takanobu Sugo, Tsuyoshi Tsutsui | 1997-07-15 |
| 5639627 | Method for assaying specific antibody | — | 1997-06-17 |
| 5633713 | Method and system for evaluating distribution of absorption light amount in optical lithography | Soichi Inoue | 1997-05-27 |
| 5617537 | Message passing system for distributed shared memory multiprocessor system and message passing method using the same | Shigeki Yamada, Katsumi MARUYAMA, Minoru Kubota | 1997-04-01 |
| 5609977 | Reflection phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Kenji Kawano, Hideya Miyazaki, Shinichi Ito, Soichi Inoue +2 more | 1997-03-11 |