Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664989 | Polishing pad, polishing apparatus and polishing method | Rempei Nakata, Hisashi Kaneko, Takeshi Nishioka, Yoshikuni Tateyama, Yutaka Nakano +1 more | 1997-09-09 |
| 5661345 | Semiconductor device having a single-crystal metal wiring | Junichi Wada, Hisashi Kaneko, Kyoichi Suguro, Haruo Okano | 1997-08-26 |
| 5641581 | Semiconductor device | Yukio Nishiyama, Rempei Nakata, Haruo Okano, Riichirou Aoki, Takahito Nagamatsu +3 more | 1997-06-24 |
| 5629236 | Method of manufacture of semiconductor device | Jun Wada, Hisashi Kaneko | 1997-05-13 |
| 5607718 | Polishing method and polishing apparatus | Yasutaka Sasaki, Mie Matsuo, Rempei Nakata, Junichi Wada, Hiroyuki Yano +1 more | 1997-03-04 |