Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664989 | Polishing pad, polishing apparatus and polishing method | Rempei Nakata, Hisashi Kaneko, Nobuo Hayasaka, Takeshi Nishioka, Yutaka Nakano +1 more | 1997-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664989 | Polishing pad, polishing apparatus and polishing method | Rempei Nakata, Hisashi Kaneko, Nobuo Hayasaka, Takeshi Nishioka, Yutaka Nakano +1 more | 1997-09-09 |