Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702673 | Ozone generating apparatus | Naruhiko Kaji, Rempei Nakata, Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura | 1997-12-30 |
| 5664989 | Polishing pad, polishing apparatus and polishing method | Rempei Nakata, Hisashi Kaneko, Nobuo Hayasaka, Takeshi Nishioka, Yoshikuni Tateyama +1 more | 1997-09-09 |
| 5632868 | Method and apparatus for generating ozone and methods of its use | Minoru Harada, Ryoichi Shinjo, Manabu Tsujimura, Rempei Nakata, Kunihiro Miyazaki +1 more | 1997-05-27 |