Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664989 | Polishing pad, polishing apparatus and polishing method | Rempei Nakata, Hisashi Kaneko, Nobuo Hayasaka, Takeshi Nishioka, Yoshikuni Tateyama +1 more | 1997-09-09 |
| 5607718 | Polishing method and polishing apparatus | Mie Matsuo, Rempei Nakata, Junichi Wada, Nobuo Hayasaka, Hiroyuki Yano +1 more | 1997-03-04 |