Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670808 | Metal oxide capacitor with a WN.sub.X electrode | Kazuya Nishihori, Yoshiaki Kitaura, Yoshikazu Tanabe, Tomonori Aoyama, Kumi Okuwada +2 more | 1997-09-23 |
| 5661345 | Semiconductor device having a single-crystal metal wiring | Junichi Wada, Hisashi Kaneko, Nobuo Hayasaka, Haruo Okano | 1997-08-26 |
| 5656820 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Atsushi Murakoshi, Tatsuya Hatanaka | 1997-08-12 |
| 5656859 | Semiconductor device | Atsushi Murakoshi, Masao Iwase, Mitsuo Koike, Tadayuki Asaishi | 1997-08-12 |
| 5654237 | Method of manufacturing semiconductor device | Haruo Okano | 1997-08-05 |
| 5640020 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Atsushi Murakoshi, Tatsuya Hatanaka | 1997-06-17 |
| 5592024 | Semiconductor device having a wiring layer with a barrier layer | Hisako Aoyama, Hiromi Niiyama, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 1997-01-07 |