Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656820 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Atsushi Murakoshi, Kyoichi Suguro | 1997-08-12 |
| 5640020 | Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device | Atsushi Murakoshi, Kyoichi Suguro | 1997-06-17 |