Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5595627 | Plasma etching method | Koichiro Inazawa, Shin Okamoto, Takaya Matsushita | 1997-01-21 |
| 5592024 | Semiconductor device having a wiring layer with a barrier layer | Hisako Aoyama, Kyoichi Suguro, Hiromi Niiyama, Hitoshi Tamura, Tomonori Aoyama +2 more | 1997-01-07 |