Takaya Matsushita

KT Kabushiki Kaisha Toshiba: 2 patents #169 of 1,730Top 10%

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%

TC Tomoeagawa Paper Co.: 1 patents #8 of 35Top 25%

Overall (1997): #22,751 of 185,788Top 15%

Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
5645921	Electrostatic chucking device	Tadao Matsunaga, Kei Hattori	1997-07-08
5595627	Plasma etching method	Koichiro Inazawa, Shin Okamoto, Hisataka Hayashi	1997-01-21