Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663036 | Microlithographic structure with an underlayer film comprising a thermolyzed azide | Willard E. Conley, James T. Fahey, Ratnam Sooriyakumaran, Kevin M. Welsh | 1997-09-02 |
| 5659203 | Reworkable polymer chip encapsulant | Anson J. Call, Stephen L. Buchwalter, Sushumna Iruvanti, Stanley J. Jasne, Frank L. Pompeo +1 more | 1997-08-19 |
| 5654376 | Polymeric dyes for antireflective coatings | Christopher J. Knors, Elwood Herbert Macy | 1997-08-05 |
| 5607824 | Antireflective coating for microlithography | James T. Fahey, Brian Herbst, Leo L. Linehan, Gary T. Spinillo, Kevin M. Welsh +1 more | 1997-03-04 |