Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607824 | Antireflective coating for microlithography | James T. Fahey, Brian Herbst, Wayne M. Moreau, Gary T. Spinillo, Kevin M. Welsh +1 more | 1997-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607824 | Antireflective coating for microlithography | James T. Fahey, Brian Herbst, Wayne M. Moreau, Gary T. Spinillo, Kevin M. Welsh +1 more | 1997-03-04 |