Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663036 | Microlithographic structure with an underlayer film comprising a thermolyzed azide | Willard E. Conley, James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran | 1997-09-02 |
| 5607824 | Antireflective coating for microlithography | James T. Fahey, Brian Herbst, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo +1 more | 1997-03-04 |