Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667938 | Acid scavengers for use in chemically amplified photoresists | Nageshwer Rao Bantu, William R. Brunsvold, George J. Hefferon, Wu-Song Huang, Ahmad D. Katnani +2 more | 1997-09-16 |
| 5663036 | Microlithographic structure with an underlayer film comprising a thermolyzed azide | Willard E. Conley, James T. Fahey, Wayne M. Moreau, Kevin M. Welsh | 1997-09-02 |
| 5625020 | Photoresist composition | Gregory Breyta, Christopher J. Knors, Hiroshi Ito | 1997-04-29 |
| 5609989 | Acid scavengers for use in chemically amplified photoresists | Nageshwer Rao Bantu, William R. Brunsvold, George J. Hefferon, Wu-Song Huang, Ahmad D. Katnani +2 more | 1997-03-11 |