Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663036 | Microlithographic structure with an underlayer film comprising a thermolyzed azide | James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran, Kevin M. Welsh | 1997-09-02 |
| 5644038 | Quinone diazo compound containing non-metallic atom | Ari Aviram, William R. Brunsvold, Daniel Bucca, David E. Seeger | 1997-07-01 |