Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685916 | Dry cleaning of semiconductor processing chambers | Yan Ye, Charles S. Rhoades | 1997-11-11 |
| 5676759 | Plasma dry cleaning of semiconductor processing chambers | Yan Ye, Charles S. Rhoades | 1997-10-14 |
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Timothy D. Driscoll, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |
| 5607542 | Inductively enhanced reactive ion etching | Robert Wu | 1997-03-04 |