Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685916 | Dry cleaning of semiconductor processing chambers | Charles S. Rhoades, Gerald Yin | 1997-11-11 |
| 5676759 | Plasma dry cleaning of semiconductor processing chambers | Charles S. Rhoades, Gerald Yin | 1997-10-14 |
| 5628870 | Method for marking a substrate using ionized gas | Anand Gupta, Yuri S. Uritsky | 1997-05-13 |
| 5622565 | Reduction of contaminant buildup in semiconductor apparatus | Anand Gupta, Shamouil Shamouliam | 1997-04-22 |
| 5608155 | Method and apparatus for detecting particles on a substrate | Anand Gupta | 1997-03-04 |