Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628870 | Method for marking a substrate using ionized gas | Yan Ye, Yuri S. Uritsky | 1997-05-13 |
| 5622565 | Reduction of contaminant buildup in semiconductor apparatus | Yan Ye, Shamouil Shamouliam | 1997-04-22 |
| 5622595 | Reducing particulate contamination during semiconductor device processing | Joseph Lanucha | 1997-04-22 |
| 5608155 | Method and apparatus for detecting particles on a substrate | Yan Ye | 1997-03-04 |