Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685916 | Dry cleaning of semiconductor processing chambers | Yan Ye, Gerald Yin | 1997-11-11 |
| 5676759 | Plasma dry cleaning of semiconductor processing chambers | Yan Ye, Gerald Yin | 1997-10-14 |