Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Steve S. Y. Mak, Donald Olgado, Gerald Yin, Timothy D. Driscoll, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Hiroji Hanawa, Sasson Somekh, Kenneth S. Collins | 1997-04-08 |