Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684669 | Method for dechucking a workpiece from an electrostatic chuck | Douglas A. Buchberger, Jr. | 1997-11-04 |
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Hiroji Hanawa, Sasson Somekh, Dan Maydan | 1997-04-08 |