Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5697748 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1997-12-16 |
| 5643366 | Wafer handling within a vacuum chamber using vacuum | Philip M. Salzman, Oskar U. Vierny | 1997-07-01 |
| 5636964 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1997-06-10 |
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Hiroji Hanawa, Dan Maydan, Kenneth S. Collins | 1997-04-08 |