Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688357 | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor | — | 1997-11-18 |
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Sasson Somekh, Dan Maydan, Kenneth S. Collins | 1997-04-08 |
| 5614060 | Process and apparatus for etching metal in integrated circuit structure with high selectivity to photoresist and good metal etch residue removal | — | 1997-03-25 |