Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643366 | Wafer handling within a vacuum chamber using vacuum | Sasson Somekh, Oskar U. Vierny | 1997-07-01 |
| 5630690 | Enclosure for load lock interface | — | 1997-05-20 |
| 5597439 | Process gas inlet and distribution passages | — | 1997-01-28 |