Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |