Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607542 | Inductively enhanced reactive ion etching | Gerald Yin | 1997-03-04 |
| 5605637 | Adjustable dc bias control in a plasma reactor | Hongching Shan, Evans Lee | 1997-02-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607542 | Inductively enhanced reactive ion etching | Gerald Yin | 1997-03-04 |
| 5605637 | Adjustable dc bias control in a plasma reactor | Hongching Shan, Evans Lee | 1997-02-25 |