Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702530 | Distributed microwave plasma reactor for semiconductor processing | Harald Herchen, Michael Welch | 1997-12-30 |
| 5683517 | Plasma reactor with programmable reactant gas distribution | — | 1997-11-04 |
| 5674321 | Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor | Bryan Pu | 1997-10-07 |
| 5605637 | Adjustable dc bias control in a plasma reactor | Evans Lee, Robert Wu | 1997-02-25 |