Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674321 | Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor | Hongching Shan | 1997-10-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674321 | Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor | Hongching Shan | 1997-10-07 |