Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702530 | Distributed microwave plasma reactor for semiconductor processing | Hongching Shan, Harald Herchen | 1997-12-30 |
MW
Michael Welch
Overall (1997): #101,235 of 185,788Top 55%
1
Patents 1997