Issued Patents 1994
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376405 | Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers | Gurtej S. Sandhu | 1994-12-27 |
| 5372974 | Approach to avoid buckling in BPSG by using an intermediate barrier layer | Randhir P. S. Thakur, Yauh-Ching Liu | 1994-12-13 |
| 5372973 | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | J. Brett Rolfson, Tyler Lowrey, David A. Cathey | 1994-12-13 |
| 5354490 | Slurries for chemical mechanically polishing copper containing metal layers | Chris C. Yu | 1994-10-11 |
| 5346585 | Use of a faceted etch process to eliminate stringers | Guy T. Blalock | 1994-09-13 |
| 5346587 | Planarization of a gate electrode for improved gate patterning over non-planar active area isolation | Charles H. Dennison | 1994-09-13 |
| 5344792 | Pulsed plasma enhanced CVD of metal silicide conductive films such as TiSi.sub.2 | Gurtej S. Sandhu | 1994-09-06 |
| 5329207 | Field emission structures produced on macro-grain polysilicon substrates | David A. Cathey, J. Brett Rolfson, Tyler Lowrey | 1994-07-12 |
| 5320880 | Method of providing a silicon film having a roughened outer surface | Gurtej S. Sandhu | 1994-06-14 |
| 5318927 | Methods of chemical-mechanical polishing insulating inorganic metal oxide materials | Gurtej S. Sandhu, Donald L. Westmoreland | 1994-06-07 |
| 5314843 | Integrated circuit polishing method | Chris C. Yu, Gurtej S. Sandhu | 1994-05-24 |
| RE34583 | Method of forming a configuration of interconnections on a semiconductor device having a high integration density | Malcolm Grief, Hendrikus J. W. van Houtum, Josephus M. F. G. Van Laarhoven | 1994-04-12 |
| 5292683 | Method of isolating semiconductor devices and arrays of memory integrated circuitry | Charles H. Dennison | 1994-03-08 |
| 5278100 | Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers | Gurtej S. Sandhu | 1994-01-11 |