Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368687 | Semiconductor processing method of etching insulating inorganic metal oxide materials and method of cleaning metals from the surface of semiconductor wafers | Gurtej S. Sandhu, Pierre C. Fazan | 1994-11-29 |
| 5318927 | Methods of chemical-mechanical polishing insulating inorganic metal oxide materials | Gurtej S. Sandhu, Trung T. Doan | 1994-06-07 |