Issued Patents 1994
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376483 | Method of making masks for phase shifting lithography | — | 1994-12-27 |
| 5374868 | Method for formation of a trench accessible cold-cathode field emission device | Kevin Tjaden | 1994-12-20 |
| 5372973 | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | Trung T. Doan, Tyler Lowrey, David A. Cathey | 1994-12-13 |
| 5372901 | Removable bandpass filter for microlithographic aligners | David A. Cathey | 1994-12-13 |
| 5358892 | Etch stop useful in avoiding substrate pitting with poly buffered locos | — | 1994-10-25 |
| 5358599 | Process for etching a semiconductor device using an improved protective etching mask | David A. Cathey | 1994-10-25 |
| 5329207 | Field emission structures produced on macro-grain polysilicon substrates | David A. Cathey, Tyler Lowrey, Trung T. Doan | 1994-07-12 |
| 5300463 | Method of selectively etching silicon dioxide dielectric layers on semiconductor wafers | David A. Cathey | 1994-04-05 |
| 5275237 | Liquid filled hot plate for precise temperature control | Michael W. Starkweather | 1994-01-04 |