Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D352910 | Processing machine for electron beam lithography system | Takashi Yamamoto, Tomoyuki Miyata, Kazunori Hasimoto, Mitsuru Ohnuma, Toshihiko Wada +1 more | 1994-11-29 |
| 5358904 | Semiconductor device | Gen Murakami, Kunihiro Tsubosaki, Masahiro Ichitani, Kunihiko Nishi, Ichiro Anjoh +19 more | 1994-10-25 |
| 5311026 | Charged particle beam lithography system and method therefor | Norio Saitou, Yoshihiko Okamoto, Hideo Todokoro | 1994-05-10 |